内容标题36

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                  Silicon, GaAs wafers and other substrates become transparent at infrared (IR) wavelengths. High performance IR optics in combination with a high efficiency InGaAs camera provide images with superior resolution and contrast.


                  ADVANTAGES OF MUETEC SOLUTIONS

                  The optics are designed and optimized for the IR range from 1050 to 1550nm including IR optimized objective lenses with selectable magnifications from 2.5x, 5x, 10x, 20x, 63x, 100x.

                  The high resolution InGaAs-camera guarantees best image resolution and highest contrast images.

                  The IR optimized illumination path can be switched to incident and/or transmitted light.

                  A combination of IR & visible light inspection is supported.

                  The autofocus can be chosen between real-time laser autofocus or the highly intelligent fast image autofocus

                  The best-in-class technology ensures worldwide leading edge performance regarding accuracy, repeatability and throughput.



                  CD & OVERLAY MEASUREMENT

                  The combination of a high resolution objective lens (up to 100x) and our powerful NanoStar software solution guarantees the best available measurement accuracy with sub-micron repeatability for CD and overlay measurements. Our systems feature a unique combination of visible and infrared illumination in order to deliver optimized results for structures on the top, and the bottom, and inside the substrate.

                  PRODUCTS
                  • DaVinci 200IR + 300IR
                    200mm MEMS inspection and metrology system (SMIF)
                    DaVinci 200IR + 300IR

                    Typical Applications

                    Sealing Inspection after bonding (eutectic bonding or glass frit bonding)

                    Device Inspection after bonding

                    Overlay Metrology after bonding

                    Critical Dimension Metrology after bonding


                    Features

                    Best inclassIR image quality with wafelengths of up to 1500nm

                    Flexible handling (backside vacuum, flipping, edge-vacuum) for MEMS specific wafers

                    Combined reflected & transmitted light illumination modes

                    SECS/GEM

                  • IRIS2100
                    200mm MEMS inspection and metrology system (open cassette)
                    IRIS2100

                    Typical Applications

                    MEMS Sealing Inspection

                    MEMS Device Inspection

                    Overlay/CD Metrology

                    Defect Review


                    Features

                    Best IR image quality

                    Flexible handling (backside vacuum, flipping, edge-vacuum) for MEMS specific wafers

                    Combined reflected & transmitted light illumination modes

                    SECS/GEM